Widest range of substrates processed with our RTP/RTPCVD systems

The cold wall chamber technology and the extended temperature range of our Rapid Thermal Processing associated with optimized susceptors allow processing the widest range of substrates:

• Silicon wafers
• Compound semiconductor wafers
• GaN/Sapphire wafers for LEDs
• Silicon carbide wafers
• Poly silicon wafers for solar cells
• Glass substrates
• Metals
• Polymers